Shane M Harlson

Title: Innovations of Shane M Harlson

Introduction

Shane M Harlson is a notable inventor based in Beaverton, Oregon. He has made significant contributions to the field of technology, particularly in the area of semiconductor manufacturing. With a total of three patents to his name, Harlson's work has had a considerable impact on the industry.

Latest Patents

Harlson's latest patents include a lined photobucket structure for back end of line (BEOL) interconnect formation. This invention describes lined photoresist structures that facilitate the fabrication of BEOL interconnects. In one embodiment, a hard mask has recesses formed within it, where liner structures are disposed on the sidewalls of each recess. Photobuckets made of photoresist material are also placed in these recesses. The liner structures serve as marginal buffers to mitigate potential misalignment effects during the exposure of photoresist material to photons or an electron beam. Another embodiment features a recess containing both a liner structure and a photobucket, both formed through the self-assembly of a photoresist-based block-copolymer.

Career Highlights

Shane M Harlson is currently employed at Intel Corporation, a leading technology company known for its innovations in semiconductor design and manufacturing. His work at Intel has allowed him to explore and develop advanced technologies that enhance the efficiency and effectiveness of semiconductor processes.

Collaborations

Harlson has collaborated with several talented individuals in his field, including James M Blackwell and Eungnak Han. These collaborations have contributed to the advancement of technology and innovation within the semiconductor industry.

Conclusion

Shane M Harlson's contributions to the field of semiconductor manufacturing through his innovative patents and collaborations highlight his importance as an inventor. His work continues to influence the industry and pave the way for future advancements.