This inventor holds 1 USPTO granted patent. Top assignee: Kla Tencor Corporation. Active years: 2015.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2015
Title: Shan Xue: Semiconductor Inspection Innovation
Introduction
Shan Xue is an inventor based in Santa Clara, California. His work includes semiconductor reticle inspection technology, and he is associated with KLA Tencor Corporation. His listed patent record includes 1 patent.
Latest Patents
Xue’s patent, “Method and System for Hybrid Reticle Inspection,” describes a semiconductor inspection apparatus that combines cell-to-cell, die-to-die, and die-to-golden or die-to-database inspection. The system creates a golden image or a reduced database for reticle portions that cannot be inspected through cell-to-cell or die-to-die methods. This hybrid approach is designed to support inspection across different areas of a reticle.
Career Highlights
Xue’s patent reflects work in semiconductor inspection, particularly methods for combining inspection techniques and reference data. His listed company affiliation is KLA Tencor Corporation.
Collaborations
The provided information identifies Carl Hess and John D. Miller as Xue’s coworkers. It does not specify their roles in developing the patented inspection method.
Conclusion
Shan Xue’s listed invention addresses hybrid reticle inspection by combining complementary inspection methods with golden-image or database references.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile