The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Apr. 23, 2012
Carl Hess, Los Altos, CA (US);
John D. Miller, San Jose, CA (US);
Shan Xue, Santa Clara, CA (US);
Patrick Lopresti, San Jose, CA (US);
Carl Hess, Los Altos, CA (US);
John D. Miller, San Jose, CA (US);
Shan Xue, Santa Clara, CA (US);
Patrick LoPresti, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A semiconductor inspection apparatus performs a hybrid inspection process including cell-to-cell inspection, die-to-die inspection and die-to-golden or die-to-database inspection. The apparatus creates a golden image of a reticle complimentary to portions of the reticle that can be inspected by cell-to-cell inspection or die-to-die inspection. Alternatively, the apparatus creates a reduced database complimentary to portions of the reticle that can be inspected by cell-to-cell inspection or die-to-die inspection.