Seungyoon Lee

Title: Innovations of Seungyoon Lee in Semiconductor Technology

Introduction

Seungyoon Lee is a prominent inventor based in Seoul, South Korea, known for his significant contributions to semiconductor technology. With a total of 14 patents to his name, he has made remarkable advancements in overlay correction methods and photolithography techniques.

Latest Patents

His latest patents include an overlay correcting method and a photolithography method, which are crucial for semiconductor device manufacturing. The overlay correcting method optimizes the correction of overlays within the scanner correction limits of a scanner system. This method involves collecting overlay data by measuring the overlay of a pattern, calculating correction parameters through regularized regression, and providing these parameters to the scanner. Additionally, he has developed a method for evaluating overlay correction operations and a method for fabricating semiconductor devices using the overlay correction method. This includes measuring overlays between center lines of patterns on a wafer and constructing a correction model based on polynomial fitting.

Career Highlights

Seungyoon Lee has worked with leading companies in the electronics industry, including Samsung Electronics Co., Ltd. and LG Electronics Inc. His experience in these organizations has allowed him to refine his expertise in semiconductor technologies and contribute to innovative solutions in the field.

Collaborations

He has collaborated with notable colleagues such as Jeongjin Lee and Chan Soo Hwang, further enhancing the impact of his work in the semiconductor industry.

Conclusion

Seungyoon Lee's innovative approaches to overlay correction and semiconductor manufacturing have positioned him as a key figure in the field. His contributions continue to influence advancements in technology and improve manufacturing processes.