Seung Mo Jo

Title: Seung Mo Jo: Innovator in Trench Capacitor Manufacturing

Introduction

Seung Mo Jo is a notable inventor based in Cheongju-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, particularly in trench capacitor technology. With a total of 3 patents to his name, Jo's work has advanced the efficiency and effectiveness of capacitor manufacturing processes.

Latest Patents

One of his latest patents is a method of manufacturing a trench capacitor with wafer bow. This innovative method involves several key steps. First, a deep trench is formed in a wafer. Next, a trench capacitor structure is created, which includes multiple dielectric films and conductive layers within the deep trench. The process then determines if the wafer experiences tensile stress based on the trench capacitor structure formation. To address this, a high-temperature heat treatment is performed to alter the wafer's form, counteracting the tensile stress. Finally, an inter-layer insulating film is formed on the trench capacitor structure, followed by the creation of a metal interconnect on the insulating film.

Career Highlights

Throughout his career, Seung Mo Jo has worked with prominent companies in the semiconductor industry. Notably, he has been associated with Sk Keyfoundry Inc. and Key Foundry Co., Ltd. His experience in these organizations has contributed to his expertise in trench capacitor manufacturing.

Collaborations

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Conclusion

Seung Mo Jo's innovative methods in trench capacitor manufacturing demonstrate his significant impact on the semiconductor industry. His patents reflect a commitment to advancing technology and improving manufacturing processes.