Seul Ha Myung

Title: Discovering the Innovations of Inventor Seul Ha Myung

Introduction

Seul Ha Myung is a prominent inventor based in Incheon, South Korea, known for his significant contributions to the field of semiconductor technology. With a total of three patents to his name, Myung stands out for the innovative approaches he has developed in semiconductor device manufacturing processes.

Latest Patents

Among Seul Ha Myung's latest patents is an "Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device." This advanced semiconductor processing apparatus features a chamber housing, an electrostatic chuck designed to hold a semiconductor wafer, and an edge ring that encircles the electrostatic chuck. The edge ring incorporates a ring electrode and a ring voltage supply tailored to deliver a non-sinusoidal periodic waveform. Notably, this waveform consists of a positive voltage applied during the initial time period and a negative voltage that increases in magnitude during the subsequent time period.

Another key patent is the "Method for controlling semiconductor process." This patent describes a method that employs plasma in a chamber equipped with an electrostatic chuck on which a wafer is placed. The method details the collection of ESC voltage, ESC current, and bias power, and explains how it determines whether discharge occurs between the ESC and the wafer, utilizing these parameters.

Career Highlights

Seul Ha Myung is currently employed by Samsung Electronics Co., Ltd., a global leader in technology and electronics. His remarkable inventions have played a crucial role in advancing semiconductor manufacturing techniques, enhancing efficiency and effectiveness within the industry.

Collaborations

In his pursuit of innovation, Myung collaborates with fellow experts in the field, including colleagues Jung Mo Sung and Jong Woo Sun. Together, they work on groundbreaking projects that pave the way for new developments in semiconductor technology.

Conclusion

Through his innovative patents and impactful work at Samsung Electronics Co., Ltd., Seul Ha Myung continues to make significant strides in the semiconductor industry. His contributions not only enhance current manufacturing technologies but also inspire future advancements in the field.