Company Filing History:
Years Active: 2017
Title: Innovations of Serguel Anikitchev in Laser Annealing Technology
Introduction
Serguel Anikitchev is a notable inventor based in Belmont, California. He has made significant contributions to the field of semiconductor technology, particularly in laser annealing systems. His innovative work focuses on enhancing the efficiency and effectiveness of semiconductor wafer processing.
Latest Patents
Serguel Anikitchev holds a patent for "Laser annealing systems and methods with ultra-short dwell times." This patent describes systems and methods for annealing semiconductor wafers using laser technology. The systems utilize one or two overlapping laser beams, where one serves as a pre-heat laser and the other as the annealing laser. The annealing laser scans rapidly, achieving dwell times between approximately 1 microsecond to 100 microseconds. These ultra-short dwell times are crucial for preventing damage to the device side of thin device wafers during the annealing process.
Career Highlights
Serguel Anikitchev is associated with Ultratech, Inc., where he applies his expertise in laser technology to advance semiconductor manufacturing processes. His work has been instrumental in developing methods that improve the quality and reliability of semiconductor devices.
Collaborations
Serguel collaborates with Andrew M. Hawryluk, contributing to the innovative environment at Ultratech, Inc. Their combined efforts focus on pushing the boundaries of laser annealing technology.
Conclusion
Serguel Anikitchev's contributions to laser annealing technology represent a significant advancement in semiconductor processing. His innovative patent showcases the potential for improved manufacturing techniques that enhance device performance and reliability.