This inventor holds 4 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2006-2008.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Suwon-si, KR (2006 - 2007)
- Suwon, KR (2007)
- Gyeonggi-do, KR (2008)
Company Filing History:
Years Active: 2006-2008
Title: The Innovations of Sergiy Yakovlevich Navala
Introduction
Sergiy Yakovlevich Navala is a notable inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor processing and physical vapor deposition technologies. With a total of 4 patents to his name, Navala's work has advanced the efficiency and effectiveness of various industrial processes.
Latest Patents
One of Navala's latest patents is the "Ionized physical vapor deposition apparatus using helical self-resonant coil." This innovative apparatus features a helical self-resonant coil that allows for the ignition and operation of the system at very low chamber pressures, such as approximately 0.1 mtorr. This design enables the production of high-density plasma with greater efficiency compared to conventional IPVD apparatuses, resulting in improved ionization of deposition materials.
Another significant patent is the "Gas injection apparatus for semiconductor processing system." This apparatus is designed to inject a reactive gas into a reaction chamber, ensuring a uniform flow rate through multiple nozzles. The configuration of the gas channels in the manifold equalizes the lengths of gas paths, enhancing the overall performance of the semiconductor processing system.
Career Highlights
Sergiy Navala is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and develop advanced technologies. His work has been instrumental in enhancing semiconductor processing techniques, contributing to the company's reputation as a leader in the electronics industry.
Collaborations
Navala has collaborated with notable colleagues, including Dong-joon Ma and Yuri Nikolaevich Tolmachev. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Sergiy Yakovlevich Navala's contributions to the field of semiconductor processing and physical vapor deposition are noteworthy. His innovative patents and collaborations reflect his commitment to advancing technology in the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile