Company Filing History:
Years Active: 2010-2018
Title: Sergey Latinsky: Innovator in Lithographic Mask Inspection
Introduction
Sergey Latinsky is a notable inventor based in Modiin, Israel. He has made significant contributions to the field of lithography, particularly in the area of mask inspection. With a total of 2 patents, his work has advanced the technology used in semiconductor manufacturing.
Latest Patents
Latinsky's latest patents include a "System and method for printability based inspection." This invention provides a system for assigning lithographic mask inspection process parameters. The system comprises a search module, a decision module, and a memory module. The memory module is designed to store an expected image that will be formed on a photoresist during a lithographic process. The search module is tasked with identifying printable features in the expected image. The decision module assigns different lithographic mask inspection process parameters based on whether the areas are associated with printable features or not.
Another significant patent is the "System, method and computer software product for inspecting charged particle responsive resist." This invention outlines a method for evaluating a mask, which includes defining multiple critical dimension (CD) measurement target windows and pattern recognition windows. The method ensures that these windows do not overlap, allowing for efficient critical dimension measurements of patterns during the manufacturing process.
Career Highlights
Sergey Latinsky is currently employed at Applied Materials Israel Limited, where he continues to innovate in the field of lithography. His work has been instrumental in enhancing the efficiency and accuracy of mask inspection processes.
Collaborations
Latinsky collaborates with talented coworkers such as Shay Attal and Ori Petel, contributing to a dynamic work environment that fosters innovation.
Conclusion
Sergey Latinsky's contributions to lithographic mask inspection through his patents and work at Applied Materials Israel Limited highlight his role as a key innovator in the field. His inventions are paving the way for advancements in semiconductor manufacturing technology.
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