Sergey Borodyansky

Title: Sergey Borodyansky: Innovator in Sensitivity Analysis and Electron Spectroscopy

Introduction

Sergey Borodyansky is a notable inventor based in Sunnyvale, CA (US). He has made significant contributions to the fields of sensitivity analysis and electron spectroscopy, holding a total of 3 patents. His work has implications in various technological applications, particularly in metrology and material analysis.

Latest Patents

One of his latest patents is titled "Target and process sensitivity analysis to requirements." This invention provides systems and methods for analyzing target, process, and metrology configuration sensitivities to a wide range of parameters. The systems include an input module that receives parameters related to targets and production processes, generating target data. A metrology simulation unit simulates measurements and generates metrics that quantify these measurements. A sensitivity analysis module derives functional dependencies of the metrics on the parameters, while a target optimization module ranks targets based on simulated measurements.

Another significant patent is "Step function determination of Auger peak intensity." This invention involves an electron analyzer and its method of operation, which is useful for determining the intensity of a peak in the electron spectrum. It is particularly effective for measuring the intensity of an Auger peak of a specific element in a sample. The method involves measuring the electron spectrum above and below the anticipated peak and fitting the remaining data to equations dependent on measurement energy. This invention can be applied to measure nitrogen concentration in thin protective films.

Career Highlights

Throughout his career, Sergey has worked with prominent companies such as FEI Company and KLA-Tencor Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in technology and research.

Collaborations

Some of his notable coworkers include Leonid Vasilyev and Charles E. Bryson III. Their collaborations have likely fostered an environment of innovation and creativity, leading to the development of impactful technologies.

Conclusion

Sergey Borodyansky's contributions to sensitivity analysis and electron spectroscopy highlight his role as a significant inventor in the field. His patents reflect a deep understanding of complex systems and a commitment to advancing technology.