Seonkyung Lee

Title: Innovations of Seonkyung Lee

Introduction

Seonkyung Lee is a prominent inventor based in Mountain View, CA, known for his significant contributions to the field of optical sensing and processing technologies. With a total of six patents to his name, Lee has made remarkable advancements that enhance the efficiency and accuracy of substrate processing.

Latest Patents

Among his latest patents is the "Large spot spectral sensing to control spatial setpoints." This invention features a large beam spot spectral reflectometer system designed for measuring substrates. It includes hardware components for collecting in situ large beam spot optical signals. Additionally, machine learning models for denoising these optical signals and interpreting in situ optical data to facilitate process control are disclosed. Another notable patent is the "Method and apparatus for determining process rate." This method involves dry processing a substrate in a processing chamber, where the concentration of gas byproducts is measured to determine the processing rate of the substrate.

Career Highlights

Seonkyung Lee is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing innovative solutions that improve substrate processing techniques.

Collaborations

Lee collaborates with talented professionals such as Jorge Luque and John C Valcore, Jr., contributing to a dynamic and innovative work environment.

Conclusion

Seonkyung Lee's contributions to optical sensing and substrate processing technologies exemplify his role as a leading inventor in his field. His patents reflect a commitment to advancing technology and improving industrial processes.