The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2017
Filed:
Apr. 01, 2016
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Seonkyung Lee, Mountain View, CA (US);
Dmitry Opaits, Fremont, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/55 (2014.01); G01N 21/27 (2006.01); H01J 37/00 (2006.01); G01N 21/84 (2006.01);
U.S. Cl.
CPC ...
G01N 21/55 (2013.01); G01N 21/272 (2013.01); H01J 37/00 (2013.01); G01N 2021/8411 (2013.01); G01N 2201/0633 (2013.01); G01N 2201/08 (2013.01); G01N 2201/1222 (2013.01);
Abstract
A spectral reflectometer system for measuring a substrate is provided. A light source is provided. At least one optical detector is provided. An optical cable comprises a plurality of optical fibers, wherein the plurality of optical fibers comprises a first plurality of optical fibers, which are transmission optical fibers which extend from the light source to an optical path, and a second plurality of optical fibers, which are reflection optical fibers which extend from the optical path to the at least one optical detector. A microlens array is in the optical path.