Fremont, CA, United States of America

Dmitry Opaits

USPTO Granted Patents = 5 

Average Co-Inventor Count = 3.4

ph-index = 1

Forward Citations = 4(Granted Patents)


Company Filing History:


Years Active: 2017-2023

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5 patents (USPTO):

Title: Dmitry Opaits: Innovator in Substrate Processing Technologies

Introduction

Dmitry Opaits is a notable inventor based in Fremont, CA, who has made significant contributions to the field of substrate processing technologies. With a total of 5 patents to his name, he has developed innovative solutions that enhance the efficiency and accuracy of substrate handling in various industrial applications.

Latest Patents

One of his latest patents is a reflectometer designed to monitor substrate movement. This invention includes a reflectometry system that tracks the movements of substrates, such as silicon wafers, within a process chamber. The system features a light source that emits a beam directed at the substrate, collection optics that receive the reflected light, and a processor that analyzes the signal to control the substrate's movement. Another significant patent involves systems and methods for aligning measurement devices in substrate processing systems. This invention includes a substrate support with a controller that adjusts the position of an edge ring to tilt the substrate, ensuring precise alignment based on reflected signals.

Career Highlights

Dmitry has worked with prominent companies such as Lam Research Corporation and General Electric Company. His experience in these organizations has allowed him to refine his skills and contribute to cutting-edge technologies in substrate processing.

Collaborations

Throughout his career, Dmitry has collaborated with talented professionals, including Jorge Luque and Seyed Gholamali Saddoughi. These partnerships have fostered innovation and the development of advanced solutions in the industry.

Conclusion

Dmitry Opaits stands out as an influential inventor in the realm of substrate processing technologies. His patents reflect a commitment to innovation and excellence, making a lasting impact on the industry.

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