Location History:
- Isehara, JP (1984 - 1985)
- Hachioji, JP (1983 - 1986)
Company Filing History:
Years Active: 1983-1986
Title: Seitaro Matsuo - Pioneer in Semiconductor Manufacturing
Introduction
Seitaro Matsuo is a prominent inventor hailing from Hachioji, Japan. With a substantial portfolio of 8 patents, he has made significant contributions to the field of semiconductor integrated circuits. His innovative approaches have facilitated advancements in manufacturing processes, addressing critical challenges in the industry.
Latest Patents
Matsuo's recent patents showcase his expertise and commitment to enhancing semiconductor technology. One of his notable inventions is a manufacturing process for semiconductor integrated circuits. This innovation utilizes a combination of a lift-off process and an ECR plasma deposition process to form various layers, such as the field isolation region, gate electrode, and interconnection lines. His method allows for the planarization of upper surfaces even when vertical dimensions exceed lateral dimensions, ultimately yielding LSIs with high packing density, high operating speed, and exceptional reliability, free from shorting and breakage.
Another significant patent encompasses a semiconductor device and its manufacturing process. In this invention, an insulator film closely deposits a conductor within a groove formed in a semiconductor substrate. The manufacturing process involves selectively etching a specimen using a resist pattern as a mask, followed by depositing a pattern forming film through plasma deposition. This technique results in a planarized surface, enhancing the overall functionality of semiconductor devices.
Career Highlights
Seitaro Matsuo is currently associated with Nippon Telegraph and Telephone Public Corporation, where he continues to contribute to innovative advancements in semiconductor technology. His keen insights and technical expertise have earned him respect and recognition within the industry.
Collaborations
Matsuo has collaborated with other notable professionals in his field, including Susumu Muramoto and Kohei Ehara. Together, they have worked on various projects that have furthered the understanding and capabilities of semiconductor manufacturing processes.
Conclusion
In conclusion, Seitaro Matsuo's impactful inventions and patents have significantly advanced the semiconductor industry. His innovative approaches to manufacturing processes not only solve existing challenges but also pave the way for future developments. Through his work at Nippon Telegraph and Telephone Public Corporation and collaborations with esteemed colleagues, Matsuo remains a key figure in semiconductor innovation.