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Seiji Kozawa

USPTO Granted Patents = 5

Average Co-Inventor Count = 2.9

ph-index = 4

Forward Citations = 32(Granted Patents)

Location History:

Uto, JP (2001)
Kumamoto, JP (2000 - 2003)
Koshi-Machi, JP (2004)
Koshi, JP (2014)

Company Filing History:

5 out of 10,295

Tokyo Electron Limited

Years Active: 2000-2014

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8812266 - Abnormality determination system and abnormality determination method for processing apparatus (2014-08-19),

2. 6814809 - Coating and developing apparatus and pattern forming method (2004-11-09),

3. 6643564 - Method of determining retreat permission position of carrier arm and teaching device thereof (2003-11-04),

4. 6332751 - Transfer device centering method and substrate processing apparatus (2001-12-25),

5. 6050389 - Carrier apparatus with more than one carrier belts and processing (2000-04-18),

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