Seiji Kozawa

Title: Seiji Kozawa: Innovator in Processing Apparatus Technology

Introduction

Seiji Kozawa is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of processing apparatus technology, holding a total of 5 patents. His work focuses on developing systems and methods that enhance the efficiency and reliability of processing apparatuses.

Latest Patents

Kozawa's latest patents include an "Abnormality determination system and abnormality determination method for processing apparatus." This innovative system features a data acquiring section that collects time-series data from sensors in processing apparatuses. It also includes a data selecting section that filters useful model data, a threshold value setting section that calculates variable threshold values, and a determining section that identifies abnormalities by comparing monitored data with these thresholds.

Another notable patent is the "Coating and developing apparatus and pattern forming method." This apparatus is equipped with a temperature adjuster that ensures substrates are maintained at a consistent temperature before exposure. This technology minimizes thermal effects during processing, leading to higher yields. The apparatus also includes advanced transfer mechanisms to enhance throughput and efficiency.

Career Highlights

Seiji Kozawa has built a successful career at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His innovative contributions have played a crucial role in advancing processing technologies, making him a respected figure in his field.

Collaborations

Throughout his career, Kozawa has collaborated with talented individuals such as Naruaki Iida and Michiaki Matsushita. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Seiji Kozawa's work exemplifies the spirit of innovation in processing apparatus technology. His patents reflect a commitment to improving efficiency and reliability in the industry. His contributions continue to influence advancements in technology, making a lasting impact on the field.