The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
Jan. 17, 2012
Naoto Nakamura, Koshi, JP;
Toshihiko Nagano, Koshi, JP;
Ryuji Asai, Koshi, JP;
Seiji Kozawa, Koshi, JP;
Naoto Nakamura, Koshi, JP;
Toshihiko Nagano, Koshi, JP;
Ryuji Asai, Koshi, JP;
Seiji Kozawa, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
An abnormality determination system for a processing apparatus includes: a data acquiring section that acquires time-series data changing with time from a signal outputted by a sensor installed in a processing apparatus for processing a processing object; a data selecting section that selects only model data, which is useful time-series data, from the time-series data acquired by the data acquiring section; a threshold value setting section configured to calculate variable threshold value data changing with time from the model data selected by the data selecting section; and a determining section configured to determine an occurrence of an abnormality by comparing time-series data to be monitored, acquired by the data acquiring section, with the variable threshold value data. The selection of model data is performed based on an evaluation performed by an inspection device which is configured to evaluate a processing result of the processing object performed by the processing apparatus.