This inventor holds 5 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2014-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2014-2026
Title: Naoto Nakamura: Innovator in Substrate Processing Technology
Introduction
Naoto Nakamura is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 5 patents. His work focuses on enhancing the efficiency and precision of substrate processing methods.
Latest Patents
Nakamura's latest patents include a "Peripheral Edge Processing Apparatus" and a "Substrate Processing Method." The peripheral edge processing apparatus features a capturing part that acquires images of the peripheral edge portion of a substrate. It includes a first calculation part that determines the theoretical peripheral edge position of a reference substrate and a second calculation part that calculates the position for a workpiece substrate. The apparatus also has a setting part for processing parameters and a processing part that executes the necessary processing based on these parameters.
The substrate processing method involves a controller that performs adjustment processing, which includes forming a film on a substrate's surface and removing the peripheral portion of the film. It also acquires surface information to adjust the cut width of the peripheral portion before peeling the film. This innovative approach enhances the overall quality and efficiency of substrate processing.
Career Highlights
Naoto Nakamura is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop and refine his innovative technologies, contributing to advancements in substrate processing.
Collaborations
Nakamura has collaborated with notable colleagues, including Tetsuro Shirasaka and Toshihiko Nagano. Their combined expertise has fostered a productive environment for innovation and development in their field.
Conclusion
Naoto Nakamura's contributions to substrate processing technology exemplify his dedication to innovation. His patents and work at Tokyo Electron Limited highlight his role as a key figure in advancing this important area of technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile