Sehoon Oh

Title: Sehoon Oh: Innovator in Substrate Processing Technology

Introduction

Sehoon Oh is a prominent inventor based in Chungcheongnam-do, South Korea. He has made significant contributions to the field of substrate processing technology, holding a total of 3 patents. His innovative approaches have enhanced the efficiency and effectiveness of various processes in this domain.

Latest Patents

One of Sehoon Oh's latest patents is an "Apparatus and method for processing substrate." This invention provides a method for processing a substrate using plasma, which boasts high plasma stability and process reproducibility. The method involves providing an apparatus that includes a plasma generating region and a process region that is separate from the plasma generating region. The substrate, which includes a silicon layer and an oxide layer, is placed in the process region. A hydrogen atmosphere is formed in the process region by introducing a hydrogen-based gas without passing through the plasma generating region. Plasma is generated by supplying a fluorine-based gas to the plasma generating region, and this plasma is then provided to the process region to selectively remove the silicon layer compared to the oxide layer.

Another notable patent is the "Nozzle and substrate treating apparatus including the same." This invention features a nozzle designed for supplying fluid to a substrate. The nozzle comprises a body that has a liquid discharge line for liquid flow and a gas discharge line that surrounds the liquid discharge line for gas flow. The body includes multiple liquid discharge holes that allow the liquid to flow through the liquid discharge line, as well as a gas discharge hole for the gas flowing through the gas discharge line.

Career Highlights

Sehoon Oh is currently employed at Semes Co., Ltd., where he continues to develop innovative technologies in substrate processing. His work has significantly impacted the industry, leading to advancements in manufacturing processes.

Collaborations

Sehoon Oh collaborates with talented individuals such as Seong-Soo Kim and Seong Gil Lee. Their combined expertise fosters a creative environment that drives innovation in their projects.

Conclusion

Sehoon Oh is a distinguished inventor whose work in substrate processing technology has led to multiple patents and significant advancements in the field. His contributions continue to influence the industry positively.