The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2018
Filed:
Jul. 29, 2016
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventors:
Assignee:
SEMES CO., LTD., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 3/00 (2006.01); B05C 5/02 (2006.01); B05B 7/10 (2006.01); B05B 7/06 (2006.01); B05B 7/08 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B05B 7/10 (2013.01); B05B 7/06 (2013.01); B05B 7/061 (2013.01); B05B 7/0815 (2013.01); B05C 5/0208 (2013.01); H01L 21/67051 (2013.01);
Abstract
A nozzle for supplying a fluid to a substrate, the nozzle including a body having a liquid discharge line through which the liquid flows and a gas discharge line that surrounds the liquid discharge line and through which a gas flow, wherein the body includes a plurality of liquid discharge holes that discharge the liquid flowing through the liquid discharge line, and a gas discharge hole that discharges the gas flowing through the gas discharge line.