Sang M Lee

Title: **Innovative Contributions of Sang M. Lee in Semiconductor Technology**

Introduction

Sang M. Lee is an accomplished inventor based in Cupertino, California, known for his innovative contributions to the semiconductor industry. With a focus on improving the interface between dielectric films and copper lines, Lee has developed a patented process that enhances manufacturing techniques in electronics.

Latest Patents

Sang M. Lee holds a patent for a method titled "Selective copper-silicon-nitride layer formation for an improved dielectric film/copper line interface." This innovative process involves forming a copper-silicon-nitride layer on a copper surface of a semiconductor wafer. The procedure incorporates multiple stages, including the exposure of the wafer to different plasma sources that effectively remove copper oxide and facilitate the reaction of silane with the copper surface to generate copper silicide. The subsequent steps employ ammonia and molecular nitrogen to establish the copper silicon nitride layer, which significantly enhances the properties of the copper-dielectric interface.

Career Highlights

Sang M. Lee is currently employed at Applied Materials, Inc., a leader in the field of semiconductor manufacturing equipment. His role at the company underscores his commitment to advancing semiconductor technology through innovative solutions.

Collaborations

Throughout his career, Sang has collaborated with talented professionals, including Vladimir Zubkov and Zhenijiang Cui, who contribute to the research and development efforts at Applied Materials, Inc. These collaborations foster an environment of creativity and technical excellence, enabling the team to push the boundaries of semiconductor technologies.

Conclusion

Sang M. Lee's innovative work in developing new processes for semiconductor manufacturing has established him as a notable inventor in the field. His patented method reflects the importance of continuous innovation in technology, contributing to advancements that support the ever-evolving electronics industry.