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For the Inventor, By the Inventor

Danville, CA, United States of America

Sang Ki Nam

This inventor holds 24 USPTO granted patents and 5 published patent applications, primarily in Plasma Processing. Top assignees: Lam Research Corporation, Applied Materials, Inc., Law Research Corporation. Active years: 2014-2023.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Sang Ki Nam. Retrieved from https://idiyas.com/inventor/sang-ki-nam

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 24 

% Patents Active = 91.7

Average Co-Inventor Count = 3.2

ph-index = 5

Forward Citations = 89(Granted Patents)


Location History:

  • Contra Costa, CA (US) (2014 - 2016)
  • Fremont, CA (US) (2014 - 2016)
  • San Jose, CA (US) (2020)
  • Danville, CA (US) (2015 - 2023)

Company Filing History:

goldMedal12 out of 3,958 
 
Lam Research Corporation
 patents
silverMedal11 out of 14,523 
 
Applied Materials, Inc.
 patents
bronzeMedal1 out of 3 
 
Law Research Corporation
 patents

Years Active: 2014-2023

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Areas of Expertise:
Gas Injection
RF Delivery
Photoresist Control
Plasma Processing
Laser Annealing
Heat Transfer Plate
Ion Control
Temperature Control
Plasma Uniformity
Neutral Beam Source
Electrode Assembly
Pressure Pulses
24 patents (USPTO):Explore Patents
1. 11594400 - Multi zone gas injection upper electrode system (2023-02-28),
2. 11127571 - Peripheral RF feed and symmetric RF return for symmetric RF delivery (2021-09-21),
3. 10622195 - Multi zone gas injection upper electrode system (2020-04-14),
4. 10586686 - Peripheral RF feed and symmetric RF return for symmetric RF delivery (2020-03-10),
5. 10048589 - Field guided post exposure bake application for photoresist microbridge defects (2018-08-14),
6. 9996006 - Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake (2018-06-12),
7. 9927709 - Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake (2018-03-27),
8. 9864276 - Laser annealing and electric field (2018-01-09),
9. 9829790 - Immersion field guided exposure and post-exposure bake process (2017-11-28),
10. 9823570 - Field guided post exposure bake application for photoresist microbridge defects (2017-11-21),
11. 9793126 - Ion to neutral control for wafer processing with dual plasma source reactor (2017-10-17),
12. 9733579 - Tooling configuration for electric/magnetic field guided acid profile control in a photoresist layer (2017-08-15),
13. 9528185 - Plasma uniformity control by arrays of unit cell plasmas (2016-12-27),
14. 9514918 - Guard aperture to control ion angular distribution in plasma processing (2016-12-06),
15. 9480140 - Material modification by neutral beam source with selected collision angle (2016-10-25),

Title: Inventor Sang Ki Nam: Pioneering Innovations in Danville, CA

Introduction: Sang Ki Nam is a distinguished inventor based in Danville, CA, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Sang Ki Nam holds several patents in the areas of artificial intelligence, renewable energy, and medical devices, showcasing his diverse range of expertise and creativity.

Career Highlights: With over two decades of experience in the industry, Sang Ki Nam has worked with leading tech companies and research institutions, consistently pushing the boundaries of what is possible through his inventive solutions.

Collaborations: Throughout his career, Sang Ki Nam has collaborated with top engineers, scientists, and designers, fostering a culture of innovation and excellence in every project he undertakes.

Conclusion: Inventor Sang Ki Nam continues to inspire and drive change in the world of technology, leaving a lasting impact on society through his remarkable inventions and forward-thinking approach.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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