Company Filing History:
Years Active: 2011-2013
Title: Sandy Chao: Innovator in Semiconductor Technology
Introduction
Sandy Chao is a prominent inventor based in Sunol, California. She has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. Her work focuses on innovative solutions for plasma reaction chambers used in semiconductor substrate processing.
Latest Patents
One of her latest patents is for a gasket with a positioning feature for a clamped monolithic showerhead electrode. This invention includes an electrode assembly that features an upper showerhead electrode mechanically attached to a backing plate by a series of spaced apart cam locks. The assembly also incorporates a thermally and electrically conductive gasket with projections, which is compressed between the showerhead electrode and the backing plate. This design enhances the efficiency and reliability of the plasma reaction chamber. Another notable patent is for the clamped monolithic showerhead electrode itself, which also utilizes a guard ring that surrounds the backing plate. This guard ring is movable, allowing for easy alignment and release of locking pins.
Career Highlights
Sandy Chao is currently employed at Lam Research Corporation, a leading company in the semiconductor industry. Her role involves developing advanced technologies that improve semiconductor manufacturing processes.
Collaborations
Throughout her career, Sandy has collaborated with notable colleagues, including Gregory R. Bettencourt and Gautam Bhattacharyya. These collaborations have furthered her research and development efforts in the semiconductor field.
Conclusion
Sandy Chao's innovative work in semiconductor technology has made her a key figure in the industry. Her patents reflect her commitment to advancing technology and improving manufacturing processes.