Hsinchu, Taiwan

Sagar Deepak Khivsara

USPTO Granted Patents = 7 

Average Co-Inventor Count = 8.2

ph-index = 1

Forward Citations = 4(Granted Patents)


Company Filing History:


Years Active: 2022-2025

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7 patents (USPTO):

Title: Innovator Spotlight: Sagar Deepak Khivsara

Introduction:

Sagar Deepak Khivsara is a talented inventor based in Hsinchu, Taiwan, with a passion for pioneering innovative solutions in the field of lithography. With four patents to his name, Khivsara has made significant contributions to the advancement of extreme ultraviolet lithography processes.

Latest Patents:

1. Acoustic particle deflection in lithography tool: Khivsara's method revolutionizes extreme ultraviolet lithography by utilizing laser-induced plasma to generate EUV light for semiconductor substrate patterning.

2. System and method for performing extreme ultraviolet photolithography processes: Khivsara's photolithography system optimizes tin droplet irradiation to produce high-quality extreme ultraviolet radiation while minimizing contamination of collector mirrors.

Career Highlights:

Khivsara is a valued member of Taiwan Semiconductor Manufacturing Company Ltd., a prominent player in the semiconductor industry known for its cutting-edge technology and innovative solutions. His work showcases his expertise and dedication to pushing the boundaries of lithography processes.

Collaborations:

In his professional journey, Khivsara has collaborated with industry experts such as Tai-Yu Chen and Shang-Chieh Chien. Together, they have worked towards creating novel solutions and advancing the realm of lithography technology.

Conclusion:

Sagar Deepak Khivsara's relentless pursuit of innovation and his groundbreaking patents in lithography technology exemplify his commitment to driving progress in the semiconductor industry. His contributions continue to shape the future of extreme ultraviolet lithography, setting new standards for precision and efficiency in semiconductor manufacturing.

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