Taiwan Semiconductor Manufacturing Comp. Ltd.

Sagar Deepak Khivsara

Shang-Chieh Chien

Tai-Yu Chen

Kai Tak Lam

Li-Jui Chen

Zhiqiang Wu

Heng-Hsin Liu

Chieh Hsieh

Sheng-Kang Yu

Chung-Wei Wu

Gwan-Sin Chang

Kuo-An Liu

Hsiang Mei Chen

Cho-Ying Lin

A method of extreme ultraviolet lithography includes: generating within a source vessel extreme ultraviolet (EUV) light by striking a stream of droplets of target material shot across the source vessel with pulses from a laser to create a plasma from which EUV light is emitted; directing the generated EUV light out of the source vessel through an intermediate focus cap along a pathway toward a reticle of a scanner; creating a longitudinal mechanical wave extending across the pathway; and exposing a photoresist layer on a semiconductor substrate to pattern a circuit layout by the generated EUV light.

Acoustic particle deflection in lithography tool

A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become a plasma and emit extreme ultraviolet radiation. The photolithography system senses contamination of a collector mirror by the tin droplets and adjusts the flow of a buffer fluid to reduce the contamination.

System and method for performing extreme ultraviolet photolithography processes

A light source is provided capable of maintaining the temperature of a collector surface at or below a predetermined temperature. The light source in accordance with various embodiments of the present disclosure includes a processor, a droplet generator for generating a droplet to create extreme ultraviolet light, a collector for reflecting the extreme ultraviolet light into an intermediate focus point, a light generator for generating pre-pulse light and main pulse light, and a thermal image capture device for capturing a thermal image from a reflective surface of the collector.

Lithography thermal control

Growing community of inventors

Hsinchu, Taiwan

Sagar Deepak Khivsara