Location History:
- Pohang-si, KR (2013)
- Gyeongsangnam-do, KR (2015)
Company Filing History:
Years Active: 2013-2015
Title: S A Nikiforov: Innovator in Plasma Processing Technologies
Introduction
S A Nikiforov is a prominent inventor based in Gyeongsangnam-do, South Korea. He has made significant contributions to the field of plasma processing technologies, holding a total of 2 patents. His work focuses on innovative methods and apparatuses that enhance the processing of various workpieces.
Latest Patents
Nikiforov's latest patents include a Plasma Immersion Ion Milling Apparatus and Method. This invention discloses an apparatus and method for low-temperature plasma immersion processing of a variety of workpieces using accelerated ions. The low-temperature plasma is distributed around a cylindrical workpiece placed in a chamber, where the workpiece is enclosed with a housing that includes a multi-slot extracting electrode. A negative potential is applied to the workpiece and the electrode, allowing ions from the plasma to be accelerated and bombard the workpiece, effectively polishing its surface. This method is particularly effective for surface smoothing of large cylindrical substrates, especially those used for micro or nanopattern transfer.
Another notable patent is the Cylindrical Magnetic Levitation Stage. This invention provides a cylindrical magnetic levitation stage that includes a cylindrical substrate used to form micro-patterns of various arbitrary shapes on large-area semiconductor substrates or display panel substrates. The stage utilizes a combination of permanent magnet arrays and coil arrays to finely control the levitation, axial translation, and rotation of the cylindrical substrate through the interaction of magnetic fields.
Career Highlights
S A Nikiforov is affiliated with the Korea Electrotechnology Research Institute, where he continues to advance research in plasma technologies. His innovative approaches have positioned him as a key figure in the development of advanced manufacturing techniques.
Collaborations
Nikiforov has collaborated with notable colleagues, including Sung Il Chung and Jeong Woo Jeon, contributing to the advancement of their shared research interests.
Conclusion
S A Nikiforov's contributions to plasma processing technologies through his patents demonstrate his innovative spirit and commitment to advancing the field. His work continues to influence the development of new manufacturing techniques and applications.