Location History:
- Machida, JA (1976 - 1977)
- Machida, JP (1978 - 1982)
- Yokosuka, JP (1979 - 1984)
- Kawasaki, JP (1987 - 2001)
Company Filing History:
18 out of 90,809 
1 out of 374 
Years Active: 1976-2001
Title: Inventor Profile: Ryusho Hirose
Introduction
Ryusho Hirose, an accomplished inventor based in Kawasaki, Japan, holds an impressive portfolio of 18 patents. His work primarily focuses on projection exposure apparatuses used in sophisticated device manufacturing methods, which are integral to modern technology.
Latest Patents
Hirose's latest innovations include a projection exposure apparatus and a device manufacturing method. The first invention encompasses an illumination optical system designed to illuminate a mask using light from a source, alongside a projection optical system that incorporates at least one diffractive optical element. This system is adept at producing first diffraction light, utilized for projecting an image of the mask's pattern onto a substrate while ensuring the second diffraction light contributes to a uniform intensity distribution.
Another significant patent from Hirose details a projection exposure apparatus utilizing a refracting optical system to project a pattern from an original such as a mask or reticle onto a wafer. This innovative system includes a light source that provides an excimer laser beam to illuminate the original, while the refracting optical system is composed of multiple lenses made from materials such as fused silica and calcium fluoride.
Career Highlights
Throughout his career, Ryusho Hirose has made remarkable contributions to the field of optical systems and lithography. He has worked with notable organizations including Canon and Nippon Hoso' Kyokai, where he applied his expertise in developing advanced imaging technologies.
Collaborations
Hirose has collaborated with esteemed colleagues like Kazuo Tanaka and Takao Tsuji. Their joint efforts in research and development have significantly advanced the capabilities of projection exposure technologies, contributing towards the evolution of device manufacturing processes.
Conclusion
In summary, Ryusho Hirose is a significant figure in the field of optical device innovation. With 18 patents to his name and a commitment to advancing projection exposure apparatus technologies, he continues to impact the industry considerably. His work not only emphasizes the importance of collaboration but also showcases the innovative spirit that drives technological advancement in Japan and beyond.