Canon Kabushiki Kaisha

Nippon Hoso' Kyokai

Ryusho Hirose

Kazuo Tanaka

Akiyoshi Suzuki

Kazuya Hosoe

Hiroshi Furukawa

Toshikazu Ichiyanagi

Mitsuhiro Tokuhara

Tetsuo Sueda

Akira Tajima

Yoshiyuki Sekine

Takao Tsuji

Kenji Fujikawa

Kotaro Wakui

A projection exposure apparatus includes an illumination optical system for illuminating a mask with light from a light source and a projection optical system having at least one diffractive optical element, for projecting an image of a pattern of the mask, as illuminated, onto a substrate. The at least one diffractive optical element is adapted to produce first diffraction light of an order to be used for projection of the image and second diffraction light of an order different from that of the first diffraction light. A portion of the second diffraction light is projected onto the substrate to provide a substantially uniform intensity distribution.

Projection exposure apparatus and device manufacturing method

A projection exposure apparatus for projecting, through a refracting optical system, a pattern formed on an original such as a mask or reticle onto a wafer. The projection exposure apparatus includes a light source for providing an excimer laser beam to illuminate the original. The refracting optical system includes a plurality of lenses each of which is made of fused silica (SiO.sub.2) or calcium fluoride (CaF.sub.2).

Projection exposure apparatus

A projection exposure apparatus for projecting a pattern of a mask onto a wafer, wherein the wavelength of light irradiating the mask is made adjustable to change the state of image formation, such as the imaging magnification, focus, etc., with respect to the mask pattern projected onto the wafer.

A reflection optical system includes at least one component mirror system effective to form an image at an enlarged magnification, at least one component mirror system effective to form an image at a reduced magnification, and an optical system for sequentially and repeatedly forming an image of an object at a reduced overall magnification, the optical system containing the enlarging power component mirror system and the reducing power component mirror system. In one form of the invention, the component mirror systems and an additional component system, if any, are arranged tandem to constitute a tandem compound optical system.

Reflection optical system

A reflecting optical system including a concave mirror and a convex mirror having opposing reflecting surfaces and disposed coaxially with each other. The reflecting optical system is provided with aspherical lens portions disposed between an object field and the concave mirror and between the concave mirror and an image field, respectively, to achieve a wider superior imaging region of arcuate shape.

Reflecting optical system

An off-axis imaging optical system, includes: a first imaging optical system including a reflection optical element and a refraction optical element; a second imaging optical system including a reflection optical element and a refraction optical element, wherein the second imaging optical system is disposed with respect to the first imaging optical system so as to reimage an image formed by the first imaging optical system; wherein one of the first and second imaging optical system has unit magnification or enlarging magnification imaging power, and the other imaging optical system has a reducing magnification imaging power, so as to provide a reducing magnification power as a whole.

Reflection and refraction optical system

A television camera having a photo-taking lens, an image pick-up device to take an image of a photographic object formed on its image pick-up surface by the photo-taking lens, a synchronous signal generator to control operations of the pick-up device, and an electronic view finder which displays the photographic object image based on an image pick-up signal obtained by the pick-up device. In this type of camera, there are further provided a detecting device to detect a focussed state of the photographic object image formed on the above-mentioned image pick-up surface, and a pattern generator to generate a pattern signal corresponding to the detected state. On the basis of the synchronous signal from the above-mentioned synchronous signal generator, an output from the pattern generator can be displayed at a predetermined position on the image surface of the above-mentioned electronic view finder.

Television camera

A zoom objective includes four lens groups of which the first and fourth groups are stationary, while the second and third groups are movable independently of each other. Focus adjustment of one of the second and third groups is followed by zooming relative movement of the latter two. To maintain a constant zoom ratio throughout the entire focusing range, the relative movement of the second and third groups is controlled to effect monotonic variation of the magnifying powers of the second and third groups by means of the following formulae as embodied in a microcomputer.

Zoom element focusable zoom lens

A TV camera which can detect any object distance. The image pick-up surface of the TV camera is divided into an object image forming surface and a range finding image forming surface. The object distance can be detected by reading the range finding image.

TV camera

A zoom lens having a lens part for focusing, a zooming part consisting of a plurality of movable lens groups to vary focal distance, and a lens part for imaging in the rear of the zoom lens. The lens part for imaging consists of a front group. A rear group and a variable magnification lens group can be mounted at and dismounted from a position between the front group and rear group. A range of variable focal distance can be easily changed by shifting a portion of lenses positioned closer to the image side of a diaphragm in order to separate further an exit pupil of the total system from an imaging plane as the variable magnification lens group is mounted.

Zoom lens having an easily changeable range of variable focal distance

A television camera employing a dichroic mirror light-splitting system and a supplementary light arrangement for introducing an external light beam into the dichroic mirror when the camera is initially to be adjusted with respect to pattern registration, color balance and color temperature compensation. As the dichroic mirror is selectively receptive of the light beams from the television camera lens and the light arrangement, when the external light beam is allowed to enter the dichroic mirror, the resulting outputs of three color component image pick-up tubes are electrically processed according to a predetermined program to effect automatic adjustment of the TV-camera.

Television camera optics with a light guide for camera adjustment

From an object side, there are a fixed lens, a first movable lens, a second movable lens, and a fixed lens being positioned in that order, wherein the first movble lens is coupled with a first position detecting means and the second movable lens is coupled with a second position detecting means, and at the same time it is coupled with a lens shifting means which is controlled by the above mentioned two detecting means. For photographing which involves zooming, first the second movable lens is shifted for focusing. Next, as the first movable lens is shifted, the amount of shifting is detected by the first detecting means and then the second movable lens is shifted based on the detected value of the same. The amount of shifting of said second movable lens is determined by a functional equation which has been set as the optical system is designed, while the position adjustment of the second movable lens is controlled by the lens shifting means and the second detecting means. While magnification variation is performed as a result of shifting of the first movable lens and of the second movable lens, there will be no shifting of image in an image.

Zoom lens system having electrical control of moving elements

A zoom lens system wherein the distance between the rearmost lens surface in the afocal zooming lens portion and the foremost lens surface in the image forming lens system is kept unchanged and an afocal magnification varying lens is inserted into the above described distance so as to enlarge the telefoto range, the magnification varying lens consisting of a front convergent lens group and a rear divergent lens group. The requirements for the magnification varying lens are so set that compensation for aberrations is kept in superior condition when zooming is effected by the lens system with the magnification varying lens being eliminated therefrom, while, when zooming is effected under the condition the magnification varying lens is added to the lens system, the aberrations are also well compensated for.

Zoom lens system having enlarged range of variation in magnification

A zoom lens device comprises a zooming section including a group of focusing lenses, a group of variator lenses and a group of compensator lenses, and a relay section for focusing the light beam from the zooming section. The zoom lens device permits its zooming section alone to be interchanged with another zooming section. By fitting this other zooming section to the relay section, the zoom lens device having different magnification, and so on can be obtained. The light beam from this other zooming section is substantially equal in aberration and image forming conditions to the light beam from the original zooming section.

Growing community of inventors

Kawasaki, Japan

Ryusho Hirose