This inventor holds 4 USPTO granted patents and 1 published patent application. Top assignee: Canon Kabushiki Kaisha. Active years: 2008-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2008-2026
Title: Ryota Makino: Innovator in Lithography Technology
Introduction
Ryota Makino is a prominent inventor based in Utsunomiya, Japan. He has made significant contributions to the field of lithography, holding a total of 4 patents. His work focuses on methods and apparatuses that enhance the precision and efficiency of manufacturing processes.
Latest Patents
Makino's latest patents include a method of determining the position of a mark, a lithography method, and an exposure apparatus. The method of determining the position of a mark involves a first pattern arranged in a first layer of a substrate and a second pattern in a second layer. This method determines provisional position information based on an image of the mark and acquires relative position information between the two patterns. The position of the mark is then established using both sets of information.
The exposure apparatus patent describes a system that includes an optical system with a light shielding plate. This apparatus features a rotational drive unit that allows the light shielding plate to rotate along an optical path, as well as a shift drive unit that enables movement in a direction intersecting the axis of rotation. The control unit manages the positioning of the light shielding plate to ensure accurate projection of pattern images on substrates.
Career Highlights
Ryota Makino is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His innovative work has positioned him as a key figure in the development of advanced lithography technologies.
Collaborations
Makino has collaborated with notable colleagues such as Shinichi Hirano and Yukio Takabayashi. Their combined expertise has contributed to the advancement of lithography methods and technologies.
Conclusion
Ryota Makino's contributions to lithography and exposure apparatus design have significantly impacted the field. His innovative patents reflect his dedication to enhancing manufacturing processes and precision in technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
