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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12693604 B1

PDFFull Text
Date of Patent:
Jul. 28, 2026

Filed:

Feb. 20, 2024

Method of obtaining array of plurality of regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Mitsuru Inose, Ibaraki, JP;

Ryota Makino, Tochigi, JP;

Assignee:

CANON KABUSHIKI KAISHA, Tokyo, JP;

Attorney:

ROSSI, KIMMS & McDOWELL LLP

Primary Examiner:

Christina A Riddle

Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/706841 (2023.05); G03F 7/70616 (2013.01); G03F 7/70716 (2013.01); G03F 9/7088 (2013.01);
Abstract

A method of obtaining an array of a plurality of regions on a substrate, including obtaining position measurement data by measuring a mark assigned to each sample region among the plurality of regions on the substrate, and estimating a position of each non-measurement region excluding the sample region among the plurality of regions by using a regression model used to estimate the array from the position measurement data, wherein the regression model is a nonparametric regression model.

Find Patent Forward Citations

Inose, Mitsuru. (2026). Method of obtaining array of plurality of regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus (U.S. Patent No. 12693604). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12693604

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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