Canon Kabushiki Kaisha

Ryota Makino

Shinichi Hirano

Yukio Takabayashi

Wataru Yamaguchi

A method of determining a position of a mark including a first pattern arranged in a first layer of a substrate and a second pattern arranged in a second layer of the substrate, includes determining information concerning the position of the mark as provisional position information based on an image of the mark, acquiring relative position information indicating a relative position between the first pattern and the second pattern, and determining the position of the mark based on the provisional position information and the relative position information.

Method of determining position of mark, lithography method, exposure apparatus, and article manufacturing method

An exposure apparatus including an optical system, includes a light shielding plate, a rotational drive unit configured to rotatably drive the light shielding plate around an axis of rotation along an optical path in the optical system, a shift drive unit configured to shift-drive the light shielding plate in a direction intersecting the axis of rotation, an acquisition unit configured to acquire information relating to a relative position between a reference axis serving as a reference when a pattern image is projected on a substrate by the optical system and the axis of rotation, and a control unit configured to control the rotational drive unit and the shift-drive unit so that, when projecting the pattern image on a circumferential portion near an outer edge of the substrate, the light shielding plate is positioned at a predetermined position based on the information relating to the relative position.

Exposure apparatus and device manufacturing method

A holding device including an object to be held by the holding device and having six first flat surfaces, a holding member having six second flat surfaces each being opposed to and parallel to a corresponding one of the first flat surfaces, wherein the holding member has three holding portions of one of a protruded shape and a recessed shape, and wherein two of the second flat surfaces define at least a portion of the protruded shape or recessed shape of the holding portions, and rolling elements each being provided between associated ones of the first and second flat surfaces. The object is supported by the holding member through the rolling elements.

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Utsunomiya, Japan

Ryota Makino