Location History:
- Rolla, MI (US) (2010)
- Rolla, MO (US) (2001 - 2020)
Company Filing History:
Years Active: 2001-2020
Title: The Innovative Journey of Runhui Huang
Introduction
Runhui Huang, based in Rolla, Missouri, is an accomplished inventor whose contributions to the field of materials science and engineering are notable. With a total of 13 patents to his name, Huang has been at the forefront of developing advanced materials that enhance photolithographic processes, particularly in semiconductor manufacturing.
Latest Patents
Among Huang's most recent inventions, two patents stand out. The first is for *Superplanarizing Spin-On Carbon Materials*, which includes compositions designed to fill vias and/or trenches on a substrate while planarizing the surface in a single thin layer coating process. The innovation is capable of planarizing substrates with features from about 20 nm to 220 nm wide and depths of up to 700 nm. This remarkable performance is achieved through the use of low molecular weight polymers with thermally-labile protecting groups, coupled with a delayed crosslinking reaction.
The second patent focuses on *Non-Covalently Crosslinkable Materials for Photolithography Processes*. This invention outlines compositions and methods for using non-covalently crosslinked resin coatings, which provide improved solvent resistance while allowing for easier removal compared to traditional covalently crosslinked materials. These innovative coatings are particularly beneficial for trench and gap fill applications, anti-reflective coatings, spin-on carbon layers, and etch masks.
Career Highlights
Runhui Huang currently works at Brewer Science, Inc., where he leverages his extensive knowledge in materials development. His career has been marked by a commitment to advancing technologies that facilitate more efficient and effective photolithographic techniques, playing a significant role in the semiconductor industry.
Collaborations
Throughout his career, Huang has worked alongside talented colleagues including Rama Puligadda and Chelladurai Devadoss. Their collaboration has fostered an environment of innovation and creativity, allowing for the development of cutting-edge materials that address industry challenges.
Conclusion
Runhui Huang's contributions to material science highlight his pivotal role as an inventor. With 13 patents under his belt, his latest innovations continue to push the boundaries of photolithography applications, showcasing the impact of his work at Brewer Science, Inc. As the field of semiconductor manufacturing evolves, Huang's inventions will likely play a critical role in shaping future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.