Location History:
- Nirasaki, JP (2021 - 2023)
- Yamanashi, JP (2021 - 2023)
Company Filing History:
Years Active: 2021-2023
Title: Rui Kanemura: Innovator in Exhaust and Film Forming Technologies
Introduction
Rui Kanemura is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the fields of exhaust devices and film forming technologies. With a total of 5 patents to his name, Kanemura continues to push the boundaries of innovation in his industry.
Latest Patents
Kanemura's latest patents include an exhaust device and a film forming method. The exhaust device features a first pressure regulator in an exhaust pipe connected to a processing container, along with a second pressure regulator downstream. It also includes a first vacuum gauge upstream of the first pressure regulator and a second vacuum gauge positioned between the two regulators. His film forming method is designed to create a silicon film with step coverage on a substrate that has a recess. This method involves forming a thicker silicon film on the upper portion of the side wall of the recess compared to the lower portion, achieved by supplying a silicon-containing gas. The process also includes etching a portion of the silicon film by using an etching gas, with the number of repetitions determined by the desired step coverage.
Career Highlights
Rui Kanemura is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in developing advanced technologies that enhance processing efficiency and product quality.
Collaborations
Kanemura has collaborated with esteemed colleagues such as Hiroyuki Hayashi and Yutaka Motoyama. Their combined expertise has contributed to the successful development of innovative solutions in their respective fields.
Conclusion
Rui Kanemura's contributions to exhaust and film forming technologies highlight his role as a key innovator in the industry. His patents reflect a commitment to advancing technology and improving manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.