Ruben Remco Lieten

Title: Innovations of Ruben Remco Lieten

Introduction

Ruben Remco Lieten is a notable inventor based in Leuven, Belgium. He has made significant contributions to the field of materials science, particularly in the area of cobalt deposition processes. His innovative work has implications for various high-tech applications, including semiconductor devices and solar panels.

Latest Patents

Lieten holds a patent titled "Cobalt deposition selectivity on copper and dielectrics." This patent describes a process for forming cobalt on a substrate by volatilizing a cobalt precursor to create a precursor vapor. The vapor is then contacted with the substrate under specific vapor deposition conditions, which do not exceed 200°C. The substrate includes a copper surface and dielectric material, such as ultra-low dielectric material. This cobalt deposition process can be utilized to manufacture product articles where the deposited cobalt serves as a capping layer, encapsulating layer, electrode, diffusion layer, or seed for electroplating of metal. The process also includes a cleaning composition containing base and oxidizing agent components to reduce defects in the deposited cobalt.

Career Highlights

Ruben Remco Lieten is currently employed at Entegris, Inc., where he continues to advance his research and development efforts. His work is pivotal in enhancing the performance and reliability of electronic components through innovative material deposition techniques.

Collaborations

Lieten collaborates with esteemed colleagues, including Philip S H Chen and William Hunks, who contribute to his research endeavors and help drive innovation in the field.

Conclusion

Ruben Remco Lieten's contributions to cobalt deposition technology exemplify the intersection of innovation and practical application in modern electronics. His work not only advances scientific understanding but also paves the way for future technological developments.