Ruben Hendrik C Dilissen

Title: Ruben Hendrik C. Dilissen: Optical Isolation for EUV Lithography

Introduction

Ruben Hendrik C. Dilissen is an inventor based in Herentals, Belgium. His patent work includes technology for optical isolation in seed lasers, a component relevant to advanced laser systems and lithographic equipment.

Latest Patents

Dilissen is associated with 1 patent: “Seed laser optical isolator, seed isolator module, EUV radiation source, lithographic apparatus and optical isolator operating method.” The invention describes an optical isolator that uses an acousto-optic modulator crystal to manipulate incident laser light. A cooling system regulates the crystal’s temperature, with a heat-transfer assembly—including an active heat-transfer element—moving heat from the crystal to a fluid-cooled element. The design is intended for use in seed laser systems, extreme ultraviolet (EUV) radiation sources, and lithographic apparatus.

Career Highlights

Dilissen is associated with ASML Netherlands B.V., a company whose technologies support semiconductor manufacturing. His patent focuses on managing heat in an optical isolator, addressing a practical engineering challenge in laser-based lithography systems.

Collaborations

The listed coworkers associated with Dilissen include Karel Joop Bosschaart and Tomasz Czarnota.

Conclusion

Ruben Hendrik C. Dilissen’s patent describes a cooled optical isolator designed for seed lasers and lithography applications, reflecting his contribution to technologies used in semiconductor manufacturing.