The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2026

Filed:

May. 16, 2022
Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Karel Joop Bosschaart, Eindhoven, NL;

Tomasz Czarnota, Waalre, NL;

Heine Melle Mulder, Veldhoven, NL;

Ruben Hendrik C Dilissen, Herentals, BE;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/00 (2006.01); G02F 1/11 (2006.01); G03F 7/00 (2006.01); H01S 3/04 (2006.01); H05G 2/00 (2006.01); H01S 3/223 (2006.01);
U.S. Cl.
CPC ...
H01S 3/0064 (2013.01); G02F 1/11 (2013.01); G03F 7/70033 (2013.01); G03F 7/70891 (2013.01); H01S 3/0405 (2013.01); H05G 2/0082 (2024.08); G02F 2203/21 (2013.01); H01S 3/2232 (2013.01);
Abstract

The present invention relates to an optical isolator for a seed laser, comprising: an acousto-optic modulator crystal configured to manipulate laser light incident thereto, and at least one cooling system configured to regulate a temperature of the crystal, said cooling system comprising: a cooling element including one or more channels for a fluidic cooling medium, a heat transfer assembly arranged between the crystal and the cooling element to transfer heat from the crystal to the cooling element, wherein the heat transfer assembly includes an active heat transfer element.


Find Patent Forward Citations

Bosschaart, Karel. (2026). Seed laser optical isolator, seed isolator module, euv radiation source, lithographic apparatus and optical isolator operating method (U.S. Patent No. 12658660). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12658660

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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