Company Filing History:
Years Active: 2007-2011
Title: Ross E. Barker, II: Innovator in Polishing Solutions
Introduction
Ross E. Barker, II is a notable inventor based in Middletown, DE (US). He has made significant contributions to the field of polishing solutions, particularly in the semiconductor industry. With a total of 2 patents, his work focuses on enhancing the efficiency and selectivity of polishing methods.
Latest Patents
Barker's latest patents include a "Selective Barrier Metal Polishing Method" and a "Selective Barrier Metal Polishing Solution." The polishing method utilizes a specialized solution designed to remove barrier materials while preserving interconnect metals and dielectrics. This solution contains 0.1 to 10 percent hydrogen peroxide, various pH adjusting agents, and a benzotriazole inhibitor to control the removal rate of interconnect metals. The solution achieves a tantalum nitride material to copper selectivity of at least 3 to 1, ensuring effective polishing without damaging critical components.
Career Highlights
Ross E. Barker, II is currently employed at Rohm and Haas Electronic Materials CMP Holdings, Inc. His role involves developing innovative polishing solutions that meet the demands of modern semiconductor manufacturing. His expertise in this area has positioned him as a key player in the industry.
Collaborations
Barker collaborates with Zhendong Liu, contributing to advancements in polishing technology. Their combined efforts aim to enhance the performance and reliability of polishing solutions used in semiconductor applications.
Conclusion
Ross E. Barker, II is a distinguished inventor whose work in polishing solutions has made a significant impact on the semiconductor industry. His innovative approaches continue to drive advancements in this critical field.