Roger Patrick

Title: Innovations of Roger Patrick in Semiconductor Processing

Introduction

Roger Patrick is a notable inventor based in Santa Clara, CA, with a remarkable portfolio of 13 patents. His work primarily focuses on advancements in semiconductor processing technologies, which are crucial for the electronics industry.

Latest Patents

Among his latest patents is the "Plasma Initiating Assembly," which describes an apparatus designed to produce plasma suitable for semiconductor processing at low millitorr pressures. This innovative apparatus features a vacuum chamber with a dielectric window and a planar coil that is positioned outside the chamber. The coil is coupled to a power source, while a plasma initiator is located within the chamber. Once the plasma is initiated, the planar coil sustains it through inductive power coupling. In one embodiment, the plasma initiator acts as a secondary electrode connected to a second RF power source. Additionally, the method for igniting low-pressure inductively coupled plasma shares similar features and functionalities, emphasizing the importance of initial ionization of the process gas through various means, including ultraviolet light sources and electrical arc devices.

Career Highlights

Roger Patrick has made significant contributions to the field of semiconductor technology during his career. He has worked with prominent companies such as LSI Logic Corporation, where he honed his skills and developed innovative solutions that have impacted the industry.

Collaborations

Throughout his career, Roger has collaborated with esteemed colleagues, including Frank Bose and Philippe Schoenborn, who have also made notable contributions to technology and innovation.

Conclusion

Roger Patrick's inventions and patents have played a vital role in advancing semiconductor processing technologies. His innovative approaches continue to influence the industry and pave the way for future developments.