This inventor holds 5 USPTO granted patents. Top assignee: General Electric Company. Active years: 1985-1989.
Company Filing History:
Years Active: 1985-1989
Title: The Innovations of Robert W. Stoll
Introduction
Robert W. Stoll is a notable inventor based in Schenectady, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work has been instrumental in advancing the efficiency and effectiveness of various manufacturing processes.
Latest Patents
Stoll's latest patents include innovative methods that enhance semiconductor fabrication. One of his key inventions is the "Active area planarization with self-aligned contacts." This patent describes a molybdenum gate electrode material that is equipped with an upper layer of molybdenum nitride. This layer prevents the deposition of source and drain contact metal through selective chemical vapor deposition (CVD). Additionally, the nitride layer serves as an improved mask for ion implantation process steps, resulting in a field-effect transistor (FET) structure that exhibits a high degree of planarity, which is essential for multilevel device fabrication.
Another significant patent is the "Method for selective deposition of tungsten by chemical vapor deposition." This invention provides a method and heating apparatus for selectively depositing metal films, such as tungsten, on the metal and semiconductor surfaces of a silicon wafer. The method isolates the depositing surface of silicon wafers from both infrared radiation and the nucleating species vaporized by hot surfaces within the reaction chamber. This is achieved through a barrier that reflects or absorbs infrared radiation and condenses vaporized nucleating species before they can nucleate on metal or semiconductor surfaces.
Career Highlights
Robert W. Stoll has had a distinguished career at General Electric Company, where he has applied his expertise in semiconductor technology. His innovative approaches have led to advancements that benefit the industry and enhance manufacturing processes.
Collaborations
Throughout his career, Stoll has collaborated with notable colleagues, including Ronald H. Wilson and Michael R. MacLaury. These collaborations have fostered an environment of innovation and have contributed to the success of various projects.
Conclusion
Robert W. Stoll's contributions to semiconductor technology through his patents and collaborations have made a lasting impact on the industry. His innovative methods continue to influence the field and pave the way for future advancements.