Location History:
- Santa Clara, CA (US) (2002)
- Tigard, OR (US) (2008)
Company Filing History:
Years Active: 2002-2008
Title: The Innovative Contributions of Robert Linder
Introduction
Robert Linder is a notable inventor based in Tigard, Oregon. He has made significant contributions to the field of technology, particularly in the areas of micro and nanotechnology. With a total of 2 patents, Linder's work focuses on improving methods for modifying small structures and measuring thin coatings.
Latest Patents
Linder's latest patents include a stylus system for modifying small structures. This innovative method allows for the rapid and accurate modification of structures on a micron or nanometer scale. It is particularly suitable for repairing defects in lithographic photo-masks and semiconductors. The system employs a Stylus-Nano-Profilometer probe, which can both observe and repair conductive and non-conductive features on the surface of the mask or wafer. The probe's design enables it to perform rapid lateral strokes and create a jackhammer effect for effective material removal.
Another significant patent by Linder is a method for measuring the thickness of thin coatings. This method is applicable for coatings with thicknesses ranging from 1 to 10 nm. It utilizes a primary radiation source to create low-energy secondary electrons in the substrate. By comparing the secondary electron spectrum of a test sample with that of reference samples, the thickness of the coating can be accurately determined.
Career Highlights
Linder is currently employed at FEI Company, where he continues to develop innovative technologies. His work has had a profound impact on the fields of semiconductor manufacturing and materials science.
Collaborations
Linder has collaborated with notable colleagues, including Leonid Vasilyev and Charles E. Bryson, III. Their combined expertise has contributed to the advancement of technologies in their respective fields.
Conclusion
Robert Linder's innovative patents and contributions to technology demonstrate his commitment to advancing the field of micro and nanotechnology. His work continues to influence the industry and pave the way for future innovations.