Robert L Virkus

Title: Innovations of Robert L. Virkus

Introduction

Robert L. Virkus is a notable inventor based in Dallas, TX, who has made significant contributions to the field of semiconductor technology. With a total of 8 patents to his name, he has developed innovative methods that enhance the performance and efficiency of electronic devices.

Latest Patents

Among his latest patents is a method of forming a recessed contact bipolar transistor. This invention discloses a scaled, self-aligned bipolar transistor and a fabrication method that is compatible with MOSFET device structures. The process involves forming a transistor intrinsic base region in an isolated epitaxial region, followed by the deposition, patterning, and etching of polysilicon to create emitter regions. An oxide cap and first sidewall oxide spacers are then formed on the polysilicon emitters. The single crystal silicon is etched using the oxide-covered emitters as a mask to create recessed regions in the epitaxial layer. The extrinsic base region is formed by implanting appropriate dopants into one of the recessed regions. A second sidewall oxide spacer is formed on the vertical base emitter structure, and a heavily doped collector contact region is created by implanting dopants into another recessed silicon region. This collector contact region is self-aligned to the second sidewall oxide spacer, preventing contact between the base and heavily doped collector. Finally, the oxide cap covering the upper emitter surfaces is removed, and the emitter, base, and collector contact regions are silicided to reduce contact resistance.

Career Highlights

Robert L. Virkus has had a distinguished career at Texas Instruments Corporation, where he has been instrumental in advancing semiconductor technologies. His work has not only contributed to the company's success but has also had a lasting impact on the industry as a whole.

Collaborations

Throughout his career, Robert has collaborated with esteemed colleagues such as David B. Spratt and Eldon J. Zorinsky. These collaborations have fostered innovation and have led to the development of groundbreaking technologies in the field.

Conclusion

Robert L. Virkus is a prominent inventor whose work in semiconductor technology has paved the way for advancements in electronic devices. His innovative patents and contributions to Texas Instruments Corporation highlight his significant role in the industry.