The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 1991
Filed:
Mar. 22, 1989
Applicant:
Inventors:
Robert L Virkus, Dallas, TX (US);
Hoang H Hoang, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
357 68 ; 357 65 ; 357 71 ; 357 67 ; 437957 ; 437942 ; 437180 ; 437182 ;
Abstract
An advanced electromigration resistant lead (34) is formed over an insulator layer (36). The lead (34) is processed from a metallic film having a known grain size. A rapid thermal anneal is conducted to increase the grain size and to reduce the number of triple points. The lead (34) is also engineered to have rounded edges (40) rather than sharp edges. The rounded edges (40) reduce the amount of stress in the lead (34) and help further reduce the effects of electromigration.