Location History:
- San Jose, CA (US) (1992 - 1994)
- Cupertino, CA (US) (1994 - 2005)
Company Filing History:
Years Active: 1992-2005
Title: Robert J. Steger: Innovator in Electrostatic Chuck Technology
Introduction
Robert J. Steger, based in Cupertino, California, is an accomplished inventor with a notable portfolio of 21 patents. His contributions primarily focus on innovations in electrostatic chuck technology, significantly enhancing processes in semiconductor manufacturing.
Latest Patents
Among Robert's most recent innovations is a patent titled "Technique for Improving Chucking Reproducibility." This method and apparatus optimize the reproducibility of chucking forces in electrostatic chucks used during plasma-enhanced chemical vapor deposition (CVD) processes. By implementing a dielectric layer, such as silicon oxide, on the chuck after every cleaning, the consistency and reliability of wafer gripping are significantly improved.
Another of his remarkable inventions is the "Electrostatic Chuck Having Composite Dielectric Layer and Method of Manufacture." This electrostatic chuck design features a dual-layer of dielectric materials, enhancing the electrostatic hold on substrates like semiconductor wafers. The innovative composition allows for better performance in plasma process chambers, ensuring efficiency and precision in manufacturing.
Career Highlights
Robert J. Steger currently works at Applied Materials, Inc., a leading company in the field of materials engineering solutions, particularly for semiconductor and display technologies. His relentless pursuit of innovation has positioned him as a key figure in advancing the capabilities of electrostatic chucks and enhancing manufacturing processes.
Collaborations
Throughout his career, Robert has collaborated with other influential professionals in the field, including coworkers Brian C. Lue and Dan Maydan. Their collective expertise and innovative spirit have contributed to significant advancements in the technology sector.
Conclusion
Robert J. Steger continues to push the boundaries of technological innovation within the semiconductor industry. His inventions not only exemplify engineering excellence but also pave the way for enhanced manufacturing reliability and efficiency. Through his work at Applied Materials, Inc. and his esteemed collaborations, Robert remains a prominent figure in the landscape of electrostatic chuck technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.