Robert J Mattox

Title: The Innovations of Robert J Mattox

Introduction

Robert J Mattox is a notable inventor based in Tempe, AZ (US). He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work has been instrumental in advancing methods for fabricating semiconductor structures.

Latest Patents

One of Mattox's latest patents is a method of forming substrate contact trenches and isolation trenches. This innovative method involves providing a substrate with at least one layer formed thereon. At least two trenches are created through the layer and into the substrate, with one trench designated for isolation and another for making contact to the substrate. The process includes forming a trench liner on the sidewalls of the trenches and filling them with doped semiconductor material. The doped material in the isolation trench is then anodized, followed by oxidation of the anodized trench fill material.

Another significant patent by Mattox is for a method of forming a dielectric filled trench. This patent describes a structure and method for creating an isolation wall in an etched trench. The trench walls are covered by a thin silicon oxide layer, and the trench is conformally filled with an oxy-nitride mixture. This mixture is designed to produce a neutral to slight tensile stress relative to silicon, resulting in a simpler fabrication process that creates fewer defects in the silicon substrate compared to prior techniques. The method effectively eliminates buried voids in the filled trench.

Career Highlights

Robert J Mattox has had a distinguished career at Motorola Corporation, where he has contributed to various innovative projects. His expertise in semiconductor technology has positioned him as a key figure in the development of advanced fabrication methods.

Collaborations

Throughout his career, Mattox has collaborated with talented individuals such as Steven J Fong and Syd R Wilson. These collaborations have further enhanced the innovative work being done in the semiconductor field.

Conclusion

Robert J Mattox's contributions to semiconductor technology through his patents and work at Motorola Corporation highlight his significant impact on the industry. His innovative methods continue to shape the future of semiconductor fabrication.