San Jose, CA, United States of America

Robert B Howe


Average Co-Inventor Count = 3.0

ph-index = 2

Forward Citations = 115(Granted Patents)


Company Filing History:


Years Active: 1989-1992

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2 patents (USPTO):Explore Patents

Title: **Innovator Spotlight: Robert B. Howe**

Introduction

Robert B. Howe, an accomplished inventor based in San Jose, California, holds two patents related to advanced optical inspection systems. His innovative contributions have significantly impacted the field of defect detection in specimens with repetitive patterns.

Latest Patents

Howe's most recent patents include a **Spatial Filter for Optically Based Defect Inspection System** and an **Inspection System for an Array of Microcircuit Dies Having Redundant Patterns**. The spatial filter patent outlines a method for detecting defects by employing a Fourier transform lens to block certain spatial frequency components. This innovative spatial filter comprises an array of parallel opaque stripes on a transparent substrate, designed to correspond with diffraction orders in the Fourier transform pattern.

The second patent delineates an inspection system that utilizes both Fourier transform and inverse Fourier transform lenses to analyze illuminated areas of a patterned specimen wafer, producing selective filtering to reveal defect patterns. This inspection system is particularly useful for microcircuit dies with redundant circuit patterns and employs a two-dimensional photodetector array to ensure precise defect localization.

Career Highlights

Robert B. Howe's tenure at Insystems, Inc. has established him as a leading figure in optical inspection technology. His ingenuity and technical acumen have contributed to advancements that facilitate efficient and accurate defect detection processes within manufacturing environments.

Collaborations

Throughout his career, Howe has collaborated with talented individuals such as Lawrence H. Lin and Daniel L. Cavan. Together, they have harnessed their expertise to further enhance the capabilities of optical inspection systems, driving innovation in their respective fields.

Conclusion

Robert B. Howe's work epitomizes the spirit of innovation within the field of optical inspection technology. With his two patents, he continues to influence the industry, paving the way for more efficient and effective defect detection methods. His contributions exemplify how dedication to research and development can lead to significant advancements in technology.

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