Company Filing History:
Years Active: 1998-2002
Title: Innovations of Robert Arthur Rodriguez
Introduction
Robert Arthur Rodriguez is a notable inventor based in Austin, TX (US). He has made significant contributions to the field of integrated circuits, holding a total of 3 patents. His work focuses on methods that enhance the reliability and efficiency of electronic devices.
Latest Patents
Rodriguez's latest patents include a method for forming a conductive plug between conductive layers of an integrated circuit. This innovative method begins by etching a contact opening using a C F and CHF chemistry. The etch chemistry is then changed to an O and CH F chemistry to insitu remove the contact photoresist while tapering an upper portion of the contact opening. A tungsten deposition process follows, where the tapered portion of the contact reduces the effects of nonconformal and step-coverage-inconsistent tungsten deposition. This process significantly reduces or eliminates voids within the contact structure, thereby increasing yield, enhancing reliability, and reducing electromigration failures in integrated circuit devices.
Another patent by Rodriguez is a method for forming an integrated circuit, which also begins with etching a contact opening using a C.sub.2 F.sub.6 and CHF.sub.3 chemistry. Similar to his previous patent, the etch chemistry is changed to an O.sub.2 and CH.sub.3 F chemistry to insitu remove the contact photoresist while tapering the upper portion of the contact opening. The tungsten deposition process in this method also aims to reduce voids within the tungsten contact, ultimately improving the performance of integrated circuit devices.
Career Highlights
Rodriguez is currently employed at Motorola Corporation, where he continues to innovate in the field of electronics. His work has been instrumental in advancing technologies that are crucial for modern electronic devices.
Collaborations
Throughout his career, Rodriguez has collaborated with talented individuals such as Heather Marie Klesat and Douglas J Dopp. These collaborations have contributed to the successful development of his patented technologies.
Conclusion
Robert Arthur Rodriguez is a distinguished inventor whose work in integrated circuits has led to significant advancements in the field. His innovative methods for forming conductive plugs and integrated circuits demonstrate his commitment to enhancing the reliability and efficiency of electronic devices.