Richard J Meinecke

Title: The Innovations of Richard J Meinecke

Introduction

Richard J Meinecke is a notable inventor based in Fremont, CA. He has made significant contributions to the field of process gas delivery systems, holding a total of 5 patents. His work primarily focuses on enhancing the efficiency and accuracy of gas flow delivery in various applications.

Latest Patents

Among his latest patents, Richard has developed an "Apparatus for delivering a process gas." This innovative processing system is designed to deliver a process gas to a reaction chamber using a recipe that includes a recipe flow rate. The system features a gas flow delivery mechanism controlled by a mass flow controller (MFC) to ensure precise delivery to an orifice. The predicted flow rate is computed by pressurizing the gas and measuring upstream pressure values through sensors. Additionally, the system incorporates a programmed computing device that applies calibration factors to determine the predicted flow rate accurately.

Another significant patent is titled "Methods for delivering a process gas." This method outlines a procedure for delivering a process gas to a reaction chamber in a plasma processing system. Similar to his apparatus, this method utilizes a gas flow delivery system controlled by an MFC. The predicted flow rate is computed through pressure measurements, and calibration factors are applied to ensure accuracy.

Career Highlights

Richard J Meinecke is currently employed at Lam Research Corporation, where he continues to innovate in the field of process gas delivery systems. His expertise and contributions have been instrumental in advancing the technology used in various industrial applications.

Collaborations

Richard has collaborated with several talented individuals, including Vernon W Wong and Iqbal A Shareef. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Richard J Meinecke's work exemplifies the spirit of innovation in the field of process gas delivery systems. His patents and contributions continue to influence the industry, showcasing his dedication to advancing technology.