The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2011
Filed:
Nov. 09, 2007
Iqbal A. Shareef, Fremont, CA (US);
James V. Tietz, Fremont, CA (US);
Vernon Wong, Mountain View, CA (US);
Richard J. Meinecke, Fremont, CA (US);
Iqbal A. Shareef, Fremont, CA (US);
James V. Tietz, Fremont, CA (US);
Vernon Wong, Mountain View, CA (US);
Richard J. Meinecke, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for determining an actual gas flow rate as gas flows through a gas flow delivery system is provided. The method includes sending the gas through the gas flow delivery system into a gas conduit, wherein a section of the gas conduit is widened to form an orifice. The method also includes pressurizing the gas to create a choked flow condition within the orifice of the gas conduit. The method further includes measuring upstream pressure of the gas via a set of pressure sensors. The method yet also includes calculating the actual flow rate based on the upstream pressure of the orifice of the gas conduit.