Rex L Biggerstaff

Title: Rex L Biggerstaff: Innovator in Wafer Processing Technology

Introduction

Rex L Biggerstaff is a notable inventor based in Lubbock, Texas, recognized for his contributions to wafer processing technology. With two patents to his name, he has made significant advancements in the field, particularly in the methods and apparatuses used for processing semiconductor materials.

Latest Patents

Biggerstaff's latest patents include an "Apparatus for Wafer Processing with In Situ Rinse." This innovative apparatus features a head that defines an etching chamber, allowing for the sidewall to slide along the base. This design enables the sidewall to be moved upwardly, creating a discharge passage for rinsing water, while a deflecting surface directs the rinsing water downwardly for efficient drainage. The housing is designed to be separable above the deflector ring, providing easy access for wafer insertion and replacement.

Another significant patent is the "Gaseous Process and Apparatus for Removing Films from Substrates." This process involves removing a portion of a film from a substrate, such as a silicon wafer, while maintaining near room temperature and normal atmospheric pressure. The method includes flowing dry inert diluent gas over the substrate and introducing a reactive gas, specifically anhydrous hydrogen fluoride gas, to facilitate the removal of the film. The process is carefully controlled to ensure optimal results, depending on the type of film present on the substrate.

Career Highlights

Throughout his career, Rex L Biggerstaff has worked with prominent companies such as FSI Corporation and Texas Instruments Corporation. His experience in these organizations has contributed to his expertise in wafer processing technologies and has allowed him to develop innovative solutions that address industry challenges.

Collaborations

Biggerstaff has collaborated with notable colleagues, including Robert S Blackwood and L Davis Clements. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas in the field of semiconductor processing.

Conclusion

Rex L Biggerstaff's contributions to wafer processing technology through his patents and career experiences highlight his role as an influential inventor in the semiconductor industry. His innovative approaches continue to shape the future of wafer processing techniques.