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Chaska, MN, United States of America

Fsi Corporation

USPTO Granted Patents = 16

EPO Patents = 1

Trademarks = 1

Forward Citations = 930

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16 inventors (with patents filed for the assignee):

Robert S Blackwood (4 out of 8 patents)

Don C Burkman (4 out of 4 patents)

Robert W Grant (3 out of 14 patents)

4. David D Schumacher (3 out of 3 patents)

5. James M Silvernail (3 out of 3 patents)

6. Dallas J Schneider (2 out of 2 patents)

7. Charlie A Peterson (2 out of 2 patents)

8. C Rinn Cleavelin (1 out of 20 patents)

9. Joshua P Waldman (1 out of 7 patents)

10. L Davis Clements (1 out of 2 patents)

11. Rex L Biggerstaff (1 out of 2 patents)

12. Jitesh R Mehta (1 out of 4 patents)

13. Clifford C Miller (1 out of 1 patent)

14. William M Jenson (1 out of 2 patents)

15. Cooky Mezaki (1 out of 1 patent)

16 patents: Sort by Forward Citations

1. 4816081 - Apparatus and process for static drying of substrates (1989-03-28),

2. 4815630 - Fluid tight cover seal (1989-03-28),

3. 4801335 - Rinsing in acid processing of substrates (1989-01-31),

4. 4749440 - Gaseous process and apparatus for removing films from substrates (1988-06-07),

5. 4699298 - Bung connection (1987-10-13),

6. 4694852 - Flow regulating valve for controlling the flow of corrosive fluids (1987-09-22),

7. 4691722 - Bowl for liquid spray processing machine (1987-09-08),

8. 4682615 - Rinsing in acid processing of substrates (1987-07-28),

9. 4682614 - Wafer processing machine (1987-07-28),

10. 4664133 - Wafer processing machine (1987-05-12),

11. D286081 - Combined high intensity light and holder for silicon wafers or similar (1986-10-07),

12. 4609575 - Method of apparatus for applying chemicals to substrates in an acid (1986-09-02),

13. 4595222 - Carrier handle (1986-06-17),

14. 4286541 - Applying photoresist onto silicon wafers (1981-09-01),

15. 4197000 - Positive developing method and apparatus (1980-04-08),

FSI Corporation is a leading provider of innovative technology solutions for businesses. With a focus on delivering cutting-edge software and hardware products, FSI Corporation helps companies streamline their operations and drive growth. Backed by a team of expert professionals, FSI Corporation is dedicated to providing top-notch customer service and support to ensure client success. Visit our website to learn more about our industry-leading solutions.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

16 Patents

#9 in Chaska, MN

#576 in Minnesota

#19,312 in US

#36,684 in the World

Chaska, MN, United States of America

Fsi Corporation

Forward Citations = 930

16 inventors:

Robert S Blackwood (4 out of 8 patents)

Don C Burkman (4 out of 4 patents)

Robert W Grant (3 out of 14 patents)

4. David D Schumacher (3 out of 3 patents)

5. James M Silvernail (3 out of 3 patents)

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