For the Inventor, By the Inventor

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Chaska, MN, United States of America

Fsi Corporation

USPTO Granted Patents = 16

EPO Patents = 1

Trademarks = 1

Forward Citations = 931

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16 inventors (with patents filed for the assignee):

Robert S Blackwood (4 out of 8 patents)

Don C Burkman (4 out of 4 patents)

Robert W Grant (3 out of 14 patents)

4. David D Schumacher (3 out of 3 patents)

5. James M Silvernail (3 out of 3 patents)

6. Dallas J Schneider (2 out of 2 patents)

7. Charlie A Peterson (2 out of 2 patents)

8. C Rinn Cleavelin (1 out of 20 patents)

9. Joshua P Waldman (1 out of 7 patents)

10. L Davis Clements (1 out of 2 patents)

11. Rex L Biggerstaff (1 out of 2 patents)

12. Jitesh R Mehta (1 out of 4 patents)

13. Clifford C Miller (1 out of 1 patent)

14. William M Jenson (1 out of 2 patents)

15. Cooky Mezaki (1 out of 1 patent)

16 patents: Sort by Forward Citations

1. 4816081 - Apparatus and process for static drying of substrates (1989-03-28),

2. 4815630 - Fluid tight cover seal (1989-03-28),

3. 4801335 - Rinsing in acid processing of substrates (1989-01-31),

4. 4749440 - Gaseous process and apparatus for removing films from substrates (1988-06-07),

5. 4699298 - Bung connection (1987-10-13),

6. 4694852 - Flow regulating valve for controlling the flow of corrosive fluids (1987-09-22),

7. 4691722 - Bowl for liquid spray processing machine (1987-09-08),

8. 4682615 - Rinsing in acid processing of substrates (1987-07-28),

9. 4682614 - Wafer processing machine (1987-07-28),

10. 4664133 - Wafer processing machine (1987-05-12),

11. D286081 - Combined high intensity light and holder for silicon wafers or similar (1986-10-07),

12. 4609575 - Method of apparatus for applying chemicals to substrates in an acid (1986-09-02),

13. 4595222 - Carrier handle (1986-06-17),

14. 4286541 - Applying photoresist onto silicon wafers (1981-09-01),

15. 4197000 - Positive developing method and apparatus (1980-04-08),

Fsi Corporation, based in Chaska, MN, specializes in advanced technology solutions for various industries, focusing on the development and manufacturing of innovative products. The company is known for its expertise in fluid management systems, offering a range of solutions that enhance efficiency and performance in applications such as industrial and commercial sectors. Fsi Corporation is committed to research and development, driving advancements in technology to meet the evolving needs of its clients.

Profile summary based on public USPTO records.

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USPTO Data Jan 1 1976 - Oct 6 2026

16 Patents

#10 in Chaska, MN

#593 in Minnesota

#19,907 in US

#37,788 in the World

Chaska, MN, United States of America

Fsi Corporation

Forward Citations = 931

16 inventors:

Robert S Blackwood (4 out of 8 patents)

Don C Burkman (4 out of 4 patents)

Robert W Grant (3 out of 14 patents)

4. David D Schumacher (3 out of 3 patents)

5. James M Silvernail (3 out of 3 patents)

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