Company Filing History:
Years Active: 1986-1989
Title: **Innovative Contributions of Don C. Burkman**
Introduction
Don C. Burkman, an accomplished inventor based in Excelsior, Minnesota, has made significant strides in the field of semiconductor processing. With a total of four patents to his name, he has developed innovative solutions that enhance the efficiency and effectiveness of processing substrates in electronic device production. His latest inventions address critical challenges in static drying and rinsing processes, showcasing his dedication to advancing technology in this domain.
Latest Patents
Among Don C. Burkman's noteworthy contributions are two major patents that highlight his innovative approach:
1. **Apparatus and process for static drying of substrates** - This invention presents a method for drying semiconductor wafers while maintaining their position to avoid undesirable particles. By keeping the substrates at a 30-degree angle from the vertical within a sealed chamber filled with processing fluid, Burkman ensures thorough drainage of the fluid. A vacuum aspiration process is incorporated to degas the chamber, followed by a vacuum-assisted drain that introduces clean, dry inert gas above the draining fluid, resulting in dry substrates.
2. **Rinsing in acid processing of substrates** - This patent focuses on a chemical processing system that allows for simultaneous rinsing of substrates and the cleaning of chemical supply systems without contaminating the processing chamber. The innovation features a dedicated rinsing water spray post that atomizes rinse water using inert gas, ensuring that most of the rinsing water flows down an open drain valve, maintaining the integrity of the chemical processing.
Career Highlights
Throughout his career, Don C. Burkman has established himself as a leading figure within FSi Corporation. His dedication to innovation and efficiency has resulted in significant advancements that contribute to the quality of electronic devices. Burkman's work not only demonstrates his expertise in the field but also emphasizes the importance of practical solutions in the technology sector.
Collaborations
In the course of his innovative journey, Burkman has had the opportunity to collaborate with esteemed colleagues, including David D. Schumacher and Charlie A. Peterson. These partnerships have fostered a collaborative environment that enhances creativity and contributes to the development of cutting-edge technologies.
Conclusion
Don C. Burkman's inventive spirit and dedication to advancing semiconductor processing technology make him a noteworthy inventor in the industry. His latest patents exemplify his innovative thinking and commitment to developing solutions that address critical challenges. As technology continues to evolve, Burkman's contributions will undoubtedly play a crucial role in shaping the future of electronic device production.